From brads at snf.stanford.edu  Mon Dec  3 01:41:04 2001
From: brads at snf.stanford.edu (brads at snf.stanford.edu)
Date: Dec 3, 2001 1:41:04 PM
Subject: Shutdown lampoly 2001-12-03 13:41:03: Large Flakes falling on wafer
Message-ID: <mailman.136.1356282339.4111.lampoly-pcs@snf.stanford.edu>

When I removed the last few wafers, they all had large flakes of some polymer on the surface that had masked the etch.  My wafers are oxide mask on silicon, no PR



From booth at snf.stanford.edu  Mon Dec  3 02:47:09 2001
From: booth at snf.stanford.edu (booth at snf.stanford.edu)
Date: Dec 3, 2001 2:47:09 PM
Subject: Shutdown lampoly 2001-12-03 13:41:03: Large Flakes falling on wafer
Message-ID: <mailman.137.1356282339.4111.lampoly-pcs@snf.stanford.edu>

changing to problem report, so that
Carl Faulkner can do plasma clean
to try to remove gross polymer buildup.



From booth at snf.stanford.edu  Mon Dec  3 02:48:22 2001
From: booth at snf.stanford.edu (booth at snf.stanford.edu)
Date: Dec 3, 2001 2:48:22 PM
Subject: Problem lampoly 2001-12-03 14:48:20: Gross polymer contamination
Message-ID: <mailman.138.1356282339.4111.lampoly-pcs@snf.stanford.edu>

Carl Faulkner will try to run plasma cleans
to make chamber usable, without opening
it for wet cleaning.



From hphan at snf.stanford.edu  Mon Dec  3 03:42:16 2001
From: hphan at snf.stanford.edu (hphan at snf.stanford.edu)
Date: Dec 3, 2001 3:42:16 PM
Subject: Shutdown lampoly 2001-12-03 15:42:14: Need To Do The Wet Clean
Message-ID: <mailman.139.1356282339.4111.lampoly-pcs@snf.stanford.edu>




From cbaxter at snf.stanford.edu  Mon Dec  3 11:15:09 2001
From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu)
Date: Dec 3, 2001 11:15:09 PM
Subject: Shutdown lampoly 2001-12-03 15:42:14: Need To Do The Wet Clean
Message-ID: <mailman.140.1356282339.4111.lampoly-pcs@snf.stanford.edu>

wet clean completed. jim ran conditioning on chamber.



From cbaxter at snf.stanford.edu  Mon Dec  3 11:15:31 2001
From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu)
Date: Dec 3, 2001 11:15:31 PM
Subject: Problem lampoly 2001-12-03 14:48:20: Gross polymer contamination
Message-ID: <mailman.141.1356282339.4111.lampoly-pcs@snf.stanford.edu>

wet clean completed



From hlkung at snf.stanford.edu  Mon Dec 10 04:00:13 2001
From: hlkung at snf.stanford.edu (hlkung at snf.stanford.edu)
Date: Dec 10, 2001 4:00:13 PM
Subject: Shutdown lampoly 2001-12-10 16:00:12: wafer got jammed on the exit cassette.  alarm states Exit cassette is sensed full.
Message-ID: <mailman.142.1356282339.4111.lampoly-pcs@snf.stanford.edu>




From cbaxter at snf.stanford.edu  Mon Dec 10 04:25:47 2001
From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu)
Date: Dec 10, 2001 4:25:47 PM
Subject: Shutdown lampoly 2001-12-10 16:00:12: wafer got jammed on the exit cassette.  alarm states Exit cassette is sensed full.
Message-ID: <mailman.143.1356282339.4111.lampoly-pcs@snf.stanford.edu>

cassette was tilted and manually removed wafer and
home arm and receiver eleveator