Shutdown lampoly 2001-12-03 13:41:03: Large Flakes falling on wafer

brads at snf.stanford.edu brads at snf.stanford.edu
Mon Dec 3 01:41:04 PST 2001


When I removed the last few wafers, they all had large flakes of some polymer on the surface that had masked the etch.  My wafers are oxide mask on silicon, no PR




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