Shutdown lampoly 2001-12-03 13:41:03: Large Flakes falling on wafer

booth at snf.stanford.edu booth at snf.stanford.edu
Mon Dec 3 02:47:09 PST 2001


changing to problem report, so that
Carl Faulkner can do plasma clean
to try to remove gross polymer buildup.




More information about the lampoly-pcs mailing list