From evelyn at snf.stanford.edu  Thu Jul 12 05:26:16 2001
From: evelyn at snf.stanford.edu (evelyn at snf.stanford.edu)
Date: Jul 12, 2001 5:26:16 PM
Subject: Shutdown lampoly 2001-07-12 17:26:13: exit loadlock problem
Message-ID: <mailman.106.1356282339.4111.lampoly-pcs@snf.stanford.edu>

exit loadlock problem



From cbaxter at snf.stanford.edu  Thu Jul 12 08:46:07 2001
From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu)
Date: Jul 12, 2001 8:46:07 PM
Subject: Shutdown lampoly 2001-07-12 17:26:13: exit loadlock problem
Message-ID: <mailman.107.1356282339.4111.lampoly-pcs@snf.stanford.edu>

vented both chamber and exit load lock. vacuum broken
wafer chips and wet cleaned chamber.



From suzanne at snf.stanford.edu  Wed Jul 18 08:40:27 2001
From: suzanne at snf.stanford.edu (suzanne at snf.stanford.edu)
Date: Jul 18, 2001 8:40:27 AM
Subject: Problem lampoly 2001-07-18 08:40:26: error 297
Message-ID: <mailman.108.1356282339.4111.lampoly-pcs@snf.stanford.edu>

chamber pressure



From hphan at snf.stanford.edu  Wed Jul 18 09:38:09 2001
From: hphan at snf.stanford.edu (hphan at snf.stanford.edu)
Date: Jul 18, 2001 9:38:09 AM
Subject: Problem lampoly 2001-07-18 08:40:26: error 297
Message-ID: <mailman.109.1356282339.4111.lampoly-pcs@snf.stanford.edu>

cleared error 



From etruscan at snf.stanford.edu  Sun Jul 22 03:24:22 2001
From: etruscan at snf.stanford.edu (etruscan at snf.stanford.edu)
Date: Jul 22, 2001 3:24:22 PM
Subject: Shutdown lampoly 2001-07-22 15:24:21: 
Message-ID: <mailman.110.1356282339.4111.lampoly-pcs@snf.stanford.edu>

The output arm crashed with the unload wafer cassettee when it was trying to send the wafer into the cassettee. The wafer was manually taken out from the cassettee, but another one is still in the chamber.



From booth at snf.stanford.edu  Mon Jul 23 08:12:51 2001
From: booth at snf.stanford.edu (booth at snf.stanford.edu)
Date: Jul 23, 2001 8:12:51 AM
Subject: Shutdown lampoly 2001-07-22 15:24:21: cleared LAMpoly shutdown
Message-ID: <mailman.111.1356282339.4111.lampoly-pcs@snf.stanford.edu>

restarted system software, & removed wafer
from system.



From amol at snf.stanford.edu  Sun Jul 29 01:14:37 2001
From: amol at snf.stanford.edu (amol at snf.stanford.edu)
Date: Jul 29, 2001 1:14:37 PM
Subject: Problem lampoly 2001-07-29 13:14:36: output gate problem
Message-ID: <mailman.112.1356282339.4111.lampoly-pcs@snf.stanford.edu>

Output gate (near receiver cassette) takes too long to close.



From booth at snf.stanford.edu  Mon Jul 30 09:52:47 2001
From: booth at snf.stanford.edu (booth at snf.stanford.edu)
Date: Jul 30, 2001 9:52:47 AM
Subject: Problem lampoly 2001-07-29 13:14:36: output gate problem
Message-ID: <mailman.113.1356282339.4111.lampoly-pcs@snf.stanford.edu>

This is a known issue with our LAMpoly.
If this occurrs, wait ~3 minutes & clear the
fault.  Processing will continue normally.