Shutdown lampoly 2001-07-22 15:24:21:

etruscan at snf.stanford.edu etruscan at snf.stanford.edu
Sun Jul 22 03:24:22 PDT 2001


The output arm crashed with the unload wafer cassettee when it was trying to send the wafer into the cassettee. The wafer was manually taken out from the cassettee, but another one is still in the chamber.




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