From aaronp at snf.stanford.edu  Wed Jun 13 04:14:36 2001
From: aaronp at snf.stanford.edu (aaronp at snf.stanford.edu)
Date: Jun 13, 2001 4:14:36 PM
Subject: Shutdown lampoly 2001-06-13 16:14:34: many errors, see log. season wafer inside.
Message-ID: <mailman.98.1356282339.4111.lampoly-pcs@snf.stanford.edu>




From cbaxter at snf.stanford.edu  Wed Jun 13 09:24:35 2001
From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu)
Date: Jun 13, 2001 9:24:35 PM
Subject: Shutdown lampoly 2001-06-13 16:14:34: many errors, see log. season wafer inside.
Message-ID: <mailman.99.1356282339.4111.lampoly-pcs@snf.stanford.edu>

removed wafer and load the same wafer, could not duplicate
error. rf and gase's are stable. 



From evelyn at snf.stanford.edu  Thu Jun 14 03:11:04 2001
From: evelyn at snf.stanford.edu (evelyn at snf.stanford.edu)
Date: Jun 14, 2001 3:11:04 PM
Subject: Problem lampoly 2001-06-14 15:11:02: delayed loadlock door open
Message-ID: <mailman.100.1356282339.4111.lampoly-pcs@snf.stanford.edu>

There was a delay in the entrance loadlock before wafer goes
into the main etch chamber....I went to "menu" "#6 alarm" and 
#2 (clear) and this continues the process



From cbaxter at snf.stanford.edu  Thu Jun 14 05:52:56 2001
From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu)
Date: Jun 14, 2001 5:52:56 PM
Subject: Problem lampoly 2001-06-14 15:11:02: delayed loadlock door open
Message-ID: <mailman.101.1356282339.4111.lampoly-pcs@snf.stanford.edu>




From cmfaulkn at snf.stanford.edu  Wed Jun 20 11:55:45 2001
From: cmfaulkn at snf.stanford.edu (cmfaulkn at snf.stanford.edu)
Date: Jun 20, 2001 11:55:45 PM
Subject: Shutdown lampoly 2001-06-20 23:55:43: wafer failed to load 
Message-ID: <mailman.102.1356282339.4111.lampoly-pcs@snf.stanford.edu>

Errors 2 and 87.  Entrance load failed because entrance arm sensor failed to detect rotation.



From latta at snf.stanford.edu  Thu Jun 21 09:31:23 2001
From: latta at snf.stanford.edu (latta at snf.stanford.edu)
Date: Jun 21, 2001 9:31:23 AM
Subject: Shutdown lampoly 2001-06-20 23:55:43: wafer failed to load 
Message-ID: <mailman.103.1356282339.4111.lampoly-pcs@snf.stanford.edu>

Testing.



From cmfaulkn at snf.stanford.edu  Thu Jun 21 09:43:50 2001
From: cmfaulkn at snf.stanford.edu (cmfaulkn at snf.stanford.edu)
Date: Jun 21, 2001 9:43:50 AM
Subject: Shutdown lampoly 2001-06-21 09:43:49: Entrance load failure
Message-ID: <mailman.104.1356282339.4111.lampoly-pcs@snf.stanford.edu>

error #2 Entrance load failed requested rotate action



From cbaxter at snf.stanford.edu  Thu Jun 21 05:32:37 2001
From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu)
Date: Jun 21, 2001 5:32:37 PM
Subject: Shutdown lampoly 2001-06-21 09:43:49: Entrance load failure
Message-ID: <mailman.105.1356282339.4111.lampoly-pcs@snf.stanford.edu>

adjusted pressure 10m/t lower than crossover pressure.