Shutdown lampoly 2001-06-13 16:14:34: many errors, see log. season wafer inside.

cbaxter at snf.stanford.edu cbaxter at snf.stanford.edu
Wed Jun 13 09:24:35 PDT 2001

Previous message: Shutdown lampoly 2001-06-13 16:14:34: many errors, see log. season wafer inside.
Next message: Problem lampoly 2001-06-14 15:11:02: delayed loadlock door open
Messages sorted by: [ date ] [ thread ] [ subject ] [ author ]

removed wafer and load the same wafer, could not duplicate
error. rf and gase's are stable.

Previous message: Shutdown lampoly 2001-06-13 16:14:34: many errors, see log. season wafer inside.
Next message: Problem lampoly 2001-06-14 15:11:02: delayed loadlock door open
Messages sorted by: [ date ] [ thread ] [ subject ] [ author ]

More information about the lampoly-pcs mailing list