Problem lampoly 2001-06-14 15:11:02: delayed loadlock door open

evelyn at snf.stanford.edu evelyn at snf.stanford.edu
Thu Jun 14 03:11:04 PDT 2001


There was a delay in the entrance loadlock before wafer goes
into the main etch chamber....I went to "menu" "#6 alarm" and 
#2 (clear) and this continues the process




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