From metzler at snf.stanford.edu Thu Mar 1 12:53:57 2001 From: metzler at snf.stanford.edu (metzler at snf.stanford.edu) Date: Mar 1, 2001 12:53:57 AM Subject: Problem lampoly 2001-03-01 00:53:55: blank Si wafer stuck in chamber at 12:45 am Message-ID: From hopcroft at snf.stanford.edu Thu Mar 1 01:12:34 2001 From: hopcroft at snf.stanford.edu (hopcroft at snf.stanford.edu) Date: Mar 1, 2001 1:12:34 AM Subject: Shutdown lampoly 2001-03-01 01:12:33: wafer stuck in chamber Message-ID: From mcvittie at snf.stanford.edu Thu Mar 1 01:32:45 2001 From: mcvittie at snf.stanford.edu (mcvittie at snf.stanford.edu) Date: Mar 1, 2001 1:32:45 PM Subject: Shutdown lampoly 2001-03-01 01:12:33: wafer stuck in chamber Message-ID: Wafers all came up after clearing alarns and aborting process. However, there were 2 wafers on the exist load lock arm. They had no problem coming out. Note that I emptied input casette before clearing alarms so that I would not have to run those wafers thru the system. Jim mcVittie From mcvittie at snf.stanford.edu Thu Mar 1 01:33:12 2001 From: mcvittie at snf.stanford.edu (mcvittie at snf.stanford.edu) Date: Mar 1, 2001 1:33:12 PM Subject: Problem lampoly 2001-03-01 00:53:55: blank Si wafer stuck in chamber at 12:45 am Message-ID: See previous note. jim From seymour at snf.stanford.edu Mon Mar 12 07:26:53 2001 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Mar 12, 2001 7:26:53 AM Subject: Shutdown lampoly 2001-03-12 07:26:51: Freon 116 bottle change Message-ID: From seymour at snf.stanford.edu Mon Mar 12 09:46:26 2001 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Mar 12, 2001 9:46:26 AM Subject: Shutdown lampoly 2001-03-12 07:26:51: Freon 116 bottle changed leak check passed Message-ID: From cbaxter at snf.stanford.edu Mon Mar 12 06:53:41 2001 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Mar 12, 2001 6:53:41 PM Subject: Shutdown lampoly 2001-03-12 18:53:39: flake's on wafer.... Message-ID: From cbaxter at snf.stanford.edu Mon Mar 12 10:01:05 2001 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Mar 12, 2001 10:01:05 PM Subject: Shutdown lampoly 2001-03-12 18:53:39: flake's on wafer.... Message-ID: vented and wet cleaned chamber. pump down chamber and cycle purge 50x. chamber will need to condition. From beckwith at snf.stanford.edu Tue Mar 13 12:50:12 2001 From: beckwith at snf.stanford.edu (beckwith at snf.stanford.edu) Date: Mar 13, 2001 12:50:12 PM Subject: Comment lampoly 2001-03-13 12:50:12: 036 Alarm Message-ID: Several times during the process the 036 (exit load lock outer door closed sensor failed) alarm flashed. Since I have not seen this before I thought I would report it, perhaps the sensor is beginning to fail? From beckwith at snf.stanford.edu Mon Mar 19 01:38:19 2001 From: beckwith at snf.stanford.edu (beckwith at snf.stanford.edu) Date: Mar 19, 2001 1:38:19 PM Subject: Shutdown lampoly 2001-03-19 13:38:17: FLAKES IN CHAMBER! Message-ID: From rcrane at snf.stanford.edu Mon Mar 19 01:55:45 2001 From: rcrane at snf.stanford.edu (rcrane at snf.stanford.edu) Date: Mar 19, 2001 1:55:45 PM Subject: Shutdown lampoly 2001-03-19 13:38:17: FLAKES IN CHAMBER! Message-ID: testing in chamber From rcrane at snf.stanford.edu Mon Mar 19 01:56:12 2001 From: rcrane at snf.stanford.edu (rcrane at snf.stanford.edu) Date: Mar 19, 2001 1:56:12 PM Subject: Comment lampoly 2001-03-19 13:56:11: Flakes in chamber, testing Message-ID: From rcrane at snf.stanford.edu Mon Mar 19 01:57:08 2001 From: rcrane at snf.stanford.edu (rcrane at snf.stanford.edu) Date: Mar 19, 2001 1:57:08 PM Subject: Problem lampoly 2001-03-19 13:57:07: Flakes in chamber, testing Message-ID: From grupp at snf.stanford.edu Mon Mar 19 03:26:40 2001 From: grupp at snf.stanford.edu (grupp at snf.stanford.edu) Date: Mar 19, 2001 3:26:40 PM Subject: Shutdown lampoly 2001-03-19 15:26:39: severe particles Message-ID: From cbaxter at snf.stanford.edu Mon Mar 19 08:55:51 2001 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Mar 19, 2001 8:55:51 PM Subject: Shutdown lampoly 2001-03-19 15:26:39: severe particles Message-ID: wet cleaned chamber and wiped down exit load lock. From cbaxter at snf.stanford.edu Mon Mar 19 08:56:04 2001 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Mar 19, 2001 8:56:04 PM Subject: Problem lampoly 2001-03-19 13:57:07: Flakes in chamber, testing Message-ID: wet cleaned chamber... From beckwith at snf.stanford.edu Wed Mar 21 01:05:04 2001 From: beckwith at snf.stanford.edu (beckwith at snf.stanford.edu) Date: Mar 21, 2001 1:05:04 PM Subject: Shutdown lampoly 2001-03-21 13:05:03: Message-ID: cannot meet 10mT pressure set point; sticks @ 6 From booth at snf.stanford.edu Wed Mar 21 03:18:03 2001 From: booth at snf.stanford.edu (booth at snf.stanford.edu) Date: Mar 21, 2001 3:18:03 PM Subject: Shutdown lampoly 2001-03-21 13:05:03: LAMpoly pressure unstable Message-ID: Sharleen was seeing 6mT in step 4 of recipe 25 when the setpoint was 10mT. Manually set gas flows & did a pressure learn routine on the VAT throttle valve. Recipe 25 tested OK. From booth at snf.stanford.edu Mon Mar 26 07:23:46 2001 From: booth at snf.stanford.edu (booth at snf.stanford.edu) Date: Mar 26, 2001 7:23:46 AM Subject: Shutdown lampoly 2001-03-26 07:23:44: LoadLock pump needs oil added. Message-ID: Also need to replace DI resin cartridge. From booth at snf.stanford.edu Mon Mar 26 10:59:44 2001 From: booth at snf.stanford.edu (booth at snf.stanford.edu) Date: Mar 26, 2001 10:59:44 AM Subject: Shutdown lampoly 2001-03-26 07:23:44: LoadLock pump needs oil added. Message-ID: added gear oil to LoadLock pump changed 1 chiller resin cartridge, ordered spares