Shutdown lampoly 2001-03-01 01:12:33: wafer stuck in chamber

mcvittie at snf.stanford.edu mcvittie at snf.stanford.edu
Thu Mar 1 01:32:45 PST 2001


Wafers all came up after clearing alarns and aborting process.
However, there were 2 wafers on the exist load lock arm. They had no problem coming out.  Note that I emptied input casette 
before clearing alarms so that I would not have to run those 
wafers thru the system.    Jim mcVittie




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