Shutdown lampoly 2001-03-12 18:53:39: flake's on wafer....
cbaxter at snf.stanford.edu
cbaxter at snf.stanford.edu
Mon Mar 12 06:53:41 PST 2001
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Problem lampoly 2001-03-01 00:53:55: blank Si wafer stuck in chamber at 12:45 am
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Shutdown lampoly 2001-03-12 18:53:39: flake's on wafer....
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