From cbaxter at snf.stanford.edu  Thu May  3 10:00:37 2001
From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu)
Date: May 3, 2001 10:00:37 PM
Subject: Shutdown lampoly 2001-04-24 10:45:59: Pump being sent out for repair
Message-ID: <mailman.86.1356282338.4111.lampoly-pcs@snf.stanford.edu>

chamber ready to be condition



From cbaxter at snf.stanford.edu  Thu May  3 10:00:43 2001
From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu)
Date: May 3, 2001 10:00:43 PM
Subject: Problem lampoly 2001-04-17 10:59:40: Severe particle generation problem
Message-ID: <mailman.87.1356282338.4111.lampoly-pcs@snf.stanford.edu>




From booth at snf.stanford.edu  Wed May  9 11:34:29 2001
From: booth at snf.stanford.edu (booth at snf.stanford.edu)
Date: May 9, 2001 11:34:29 AM
Subject: Shutdown lampoly 2001-05-09 11:34:27: need to repair water leak.
Message-ID: <mailman.88.1356282338.4111.lampoly-pcs@snf.stanford.edu>




From booth at snf.stanford.edu  Wed May  9 02:08:54 2001
From: booth at snf.stanford.edu (booth at snf.stanford.edu)
Date: May 9, 2001 2:08:54 PM
Subject: Shutdown lampoly 2001-05-09 11:34:27: need to repair water leak.
Message-ID: <mailman.89.1356282338.4111.lampoly-pcs@snf.stanford.edu>

replaced LoadLock pump water flow meter fittings
to stop water leak.



From booth at snf.stanford.edu  Thu May 10 11:58:24 2001
From: booth at snf.stanford.edu (booth at snf.stanford.edu)
Date: May 10, 2001 11:58:24 AM
Subject: Shutdown lampoly 2001-05-10 11:58:23: Wafer transport failed.
Message-ID: <mailman.90.1356282338.4111.lampoly-pcs@snf.stanford.edu>




From cbaxter at snf.stanford.edu  Mon May 14 11:03:08 2001
From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu)
Date: May 14, 2001 11:03:08 PM
Subject: Shutdown lampoly 2001-05-10 11:58:23: Wafer transport failed.
Message-ID: <mailman.91.1356282338.4111.lampoly-pcs@snf.stanford.edu>

shuttle is functional now



From greene at snf.stanford.edu  Tue May 15 11:11:07 2001
From: greene at snf.stanford.edu (greene at snf.stanford.edu)
Date: May 15, 2001 11:11:07 AM
Subject: Shutdown lampoly 2001-05-15 11:11:07: wafer stuck in etch chamber
Message-ID: <mailman.92.1356282338.4111.lampoly-pcs@snf.stanford.edu>




From cbaxter at snf.stanford.edu  Tue May 15 07:06:13 2001
From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu)
Date: May 15, 2001 7:06:13 PM
Subject: Shutdown lampoly 2001-05-15 11:11:07: wafer stuck in etch chamber
Message-ID: <mailman.93.1356282338.4111.lampoly-pcs@snf.stanford.edu>

vented chamber and removed wafer. check wafer
transfer and it looks good. wet  cleaned chamber.
ran 50 pump/purge. chamber will need conditioning



From greene at snf.stanford.edu  Wed May 16 02:52:31 2001
From: greene at snf.stanford.edu (greene at snf.stanford.edu)
Date: May 16, 2001 2:52:31 PM
Subject: Shutdown lampoly 2001-05-16 14:52:30: lost wafer
Message-ID: <mailman.94.1356282338.4111.lampoly-pcs@snf.stanford.edu>

Loaded 3 wafers, only 2 wafers came out.  1 wafer is stuck in etch chamber.



From cbaxter at snf.stanford.edu  Wed May 16 06:49:32 2001
From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu)
Date: May 16, 2001 6:49:32 PM
Subject: Shutdown lampoly 2001-05-16 14:52:30: lost wafer
Message-ID: <mailman.95.1356282338.4111.lampoly-pcs@snf.stanford.edu>

reomoved wafer and wet cleaned load locks and chmaber
the color seen on exit arm is stain it will not come off.
not unless you scott brite it, which cause more paticle..



From song at snf.stanford.edu  Tue May 29 04:30:24 2001
From: song at snf.stanford.edu (song at snf.stanford.edu)
Date: May 29, 2001 4:30:24 PM
Subject: Shutdown lampoly 2001-05-29 16:30:23: 
Message-ID: <mailman.96.1356282339.4111.lampoly-pcs@snf.stanford.edu>

One wafer is stucked in the unload chamber.  Only one wafer.  No wafer in the other chambers.



From cbaxter at snf.stanford.edu  Tue May 29 05:01:21 2001
From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu)
Date: May 29, 2001 5:01:21 PM
Subject: Shutdown lampoly 2001-05-29 16:30:23: 
Message-ID: <mailman.97.1356282339.4111.lampoly-pcs@snf.stanford.edu>

vented exit load lock and removed wafer...