From booth at snf.stanford.edu Tue Oct 2 01:42:39 2001 From: booth at snf.stanford.edu (booth at snf.stanford.edu) Date: Oct 2, 2001 1:42:39 PM Subject: Shutdown lampoly 2001-09-27 17:45:26: HBr process gas is out. Message-ID: New HBr bottle has been installed. From brads at snf.stanford.edu Sat Oct 13 05:45:53 2001 From: brads at snf.stanford.edu (brads at snf.stanford.edu) Date: Oct 13, 2001 5:45:53 PM Subject: Problem lampoly 2001-10-13 17:45:52: Lampoly Error Message-ID: While Running Dummy wafers through the lampoly, I came back to the machine to see an alarm: "36 Exit Load Lock outer door closed sensor failed. Should be TRUE." I left the machine as is, with the dummy wafers still in the machine. From hphan at snf.stanford.edu Mon Oct 15 09:01:12 2001 From: hphan at snf.stanford.edu (hphan at snf.stanford.edu) Date: Oct 15, 2001 9:01:12 AM Subject: Shutdown lampoly 2001-10-15 09:01:11: Exit Load Lock Outer Door closed Sensor Failed Message-ID: From hphan at snf.stanford.edu Mon Oct 15 10:13:14 2001 From: hphan at snf.stanford.edu (hphan at snf.stanford.edu) Date: Oct 15, 2001 10:13:14 AM Subject: Shutdown lampoly 2001-10-15 09:01:11: Problem Fixed Message-ID: From hphan at snf.stanford.edu Mon Oct 15 10:13:29 2001 From: hphan at snf.stanford.edu (hphan at snf.stanford.edu) Date: Oct 15, 2001 10:13:29 AM Subject: Problem lampoly 2001-10-13 17:45:52: Lampoly Error Message-ID: