Problem lampoly 2001-10-13 17:45:52: Lampoly Error

brads at snf.stanford.edu brads at snf.stanford.edu
Sat Oct 13 05:45:53 PDT 2001


While Running Dummy wafers through the lampoly, I came back to the machine to see an alarm: "36 Exit Load Lock outer door closed sensor failed. Should be TRUE."
I left the machine as is, with the dummy wafers still in the machine. 




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