From booth at snf.stanford.edu Wed Sep 5 12:20:00 2001 From: booth at snf.stanford.edu (booth at snf.stanford.edu) Date: Sep 5, 2001 12:20:00 AM Subject: Shutdown lampoly 2001-09-05 00:19:59: BCl3 is off Message-ID: MST sensor in vault shows noise. From booth at snf.stanford.edu Wed Sep 5 12:23:38 2001 From: booth at snf.stanford.edu (booth at snf.stanford.edu) Date: Sep 5, 2001 12:23:38 AM Subject: Shutdown lampoly 2001-09-05 00:19:59: BCl3 is on - HBR is OFF Message-ID: From booth at snf.stanford.edu Wed Sep 5 12:24:23 2001 From: booth at snf.stanford.edu (booth at snf.stanford.edu) Date: Sep 5, 2001 12:24:23 AM Subject: Shutdown lampoly 2001-09-05 00:24:22: HBr is OFF Message-ID: sensor in vault is noisy From booth at snf.stanford.edu Thu Sep 6 10:33:19 2001 From: booth at snf.stanford.edu (booth at snf.stanford.edu) Date: Sep 6, 2001 10:33:19 AM Subject: Shutdown lampoly 2001-09-05 00:24:22: HBr is OFF Message-ID: OK to use HBr. From hjcho at snf.stanford.edu Mon Sep 17 11:58:42 2001 From: hjcho at snf.stanford.edu (hjcho at snf.stanford.edu) Date: Sep 17, 2001 11:58:42 AM Subject: Shutdown lampoly 2001-09-17 11:58:42: Message-ID: error 33: load lock sensor fail From booth at snf.stanford.edu Mon Sep 17 12:11:36 2001 From: booth at snf.stanford.edu (booth at snf.stanford.edu) Date: Sep 17, 2001 12:11:36 PM Subject: Shutdown lampoly 2001-09-17 11:58:42: Message-ID: manually opened then closed exit LoadLock inner door, then door sensor showed door closed sucessfully, and seasoning process continued normally. From booth at snf.stanford.edu Thu Sep 27 05:45:27 2001 From: booth at snf.stanford.edu (booth at snf.stanford.edu) Date: Sep 27, 2001 5:45:27 PM Subject: Shutdown lampoly 2001-09-27 17:45:26: HBr process gas is out. Message-ID: New HBr bottle is due in several days.