From booth at snf.stanford.edu  Thu Apr 11 06:17:16 2002
From: booth at snf.stanford.edu (booth at snf.stanford.edu)
Date: Apr 11, 2002 6:17:16 PM
Subject: Problem lampoly 2002-02-28 16:36:54: e-prom error again
Message-ID: <mailman.200.1356282339.4111.lampoly-pcs@snf.stanford.edu>

replaced bad power supply & cooling fan.



From booth at snf.stanford.edu  Thu Apr 11 06:17:47 2002
From: booth at snf.stanford.edu (booth at snf.stanford.edu)
Date: Apr 11, 2002 6:17:47 PM
Subject: Shutdown lampoly 2002-03-21 10:01:37: RF Reflect Too High (More Than !0%)
Message-ID: <mailman.201.1356282339.4111.lampoly-pcs@snf.stanford.edu>

replaced bad TCP autotune board.



From booth at snf.stanford.edu  Thu Apr 11 06:18:01 2002
From: booth at snf.stanford.edu (booth at snf.stanford.edu)
Date: Apr 11, 2002 6:18:01 PM
Subject: Problem lampoly 2002-03-21 09:41:03: lam
Message-ID: <mailman.202.1356282339.4111.lampoly-pcs@snf.stanford.edu>




From booth at snf.stanford.edu  Thu Apr 11 06:18:29 2002
From: booth at snf.stanford.edu (booth at snf.stanford.edu)
Date: Apr 11, 2002 6:18:29 PM
Subject: Problem lampoly 2002-04-11 18:18:28: need seasoning & process test.
Message-ID: <mailman.203.1356282339.4111.lampoly-pcs@snf.stanford.edu>




From booth at snf.stanford.edu  Fri Apr 12 01:15:54 2002
From: booth at snf.stanford.edu (booth at snf.stanford.edu)
Date: Apr 12, 2002 1:15:54 PM
Subject: Problem lampoly 2002-04-11 18:18:28: need seasoning & process test.
Message-ID: <mailman.204.1356282339.4111.lampoly-pcs@snf.stanford.edu>

done by kailash.



From bchui at snf.stanford.edu  Fri Apr 12 07:50:32 2002
From: bchui at snf.stanford.edu (bchui at snf.stanford.edu)
Date: Apr 12, 2002 7:50:32 PM
Subject: Problem lampoly 2002-04-12 19:50:32: wafers stuck inside
Message-ID: <mailman.205.1356282339.4111.lampoly-pcs@snf.stanford.edu>

I accidentally had the exit cassette removed while the machine was trying to unload a wafer, and it froze.  I have removed all the remaining wafers in the cassettes but otherwise left the machine the way it was.



From booth at snf.stanford.edu  Mon Apr 15 07:26:49 2002
From: booth at snf.stanford.edu (booth at snf.stanford.edu)
Date: Apr 15, 2002 7:26:49 AM
Subject: Problem lampoly 2002-04-12 19:50:32: wafers stuck inside
Message-ID: <mailman.206.1356282339.4111.lampoly-pcs@snf.stanford.edu>

removed 3 wafers from system.
Both cassettes must be in place on the
cassette elevators during processing.



From khanh at snf.stanford.edu  Wed Apr 17 02:31:21 2002
From: khanh at snf.stanford.edu (khanh at snf.stanford.edu)
Date: Apr 17, 2002 2:31:21 PM
Subject: Shutdown lampoly 2002-04-17 14:31:19: entrance load failed requested rotate action
Message-ID: <mailman.207.1356282339.4111.lampoly-pcs@snf.stanford.edu>




From cbaxter at snf.stanford.edu  Wed Apr 17 07:52:06 2002
From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu)
Date: Apr 17, 2002 7:52:06 PM
Subject: Shutdown lampoly 2002-04-17 14:31:19: entrance load failed requested rotate action
Message-ID: <mailman.208.1356282340.4111.lampoly-pcs@snf.stanford.edu>

lose 24vdc. reseated all connector on dc power supply