Problem lampoly 2002-04-12 19:50:32: wafers stuck inside

bchui at snf.stanford.edu bchui at snf.stanford.edu
Fri Apr 12 07:50:32 PDT 2002


I accidentally had the exit cassette removed while the machine was trying to unload a wafer, and it froze.  I have removed all the remaining wafers in the cassettes but otherwise left the machine the way it was.




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