From cbaxter at snf.stanford.edu  Wed Aug  7 06:44:08 2002
From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu)
Date: Aug 7, 2002 6:44:08 PM
Subject: Shutdown lampoly 2002-08-07 12:40:18: loadlock pump failed
Message-ID: <mailman.236.1356282340.4111.lampoly-pcs@snf.stanford.edu>

found load lock pump off. turn it back on and resumed
wafer on system



From gyama at snf.stanford.edu  Mon Aug 26 01:51:18 2002
From: gyama at snf.stanford.edu (gyama at snf.stanford.edu)
Date: Aug 26, 2002 1:51:18 PM
Subject: Shutdown lampoly 2002-08-26 13:51:17: wafer stuck in chamber
Message-ID: <mailman.237.1356282340.4111.lampoly-pcs@snf.stanford.edu>




From booth at snf.stanford.edu  Mon Aug 26 02:43:36 2002
From: booth at snf.stanford.edu (booth at snf.stanford.edu)
Date: Aug 26, 2002 2:43:36 PM
Subject: Shutdown lampoly 2002-08-26 13:51:17: wafer stuck in chamber
Message-ID: <mailman.238.1356282340.4111.lampoly-pcs@snf.stanford.edu>

found loadlock drypump off.  Restarted pump.



From gyama at snf.stanford.edu  Mon Aug 26 05:07:49 2002
From: gyama at snf.stanford.edu (gyama at snf.stanford.edu)
Date: Aug 26, 2002 5:07:49 PM
Subject: Shutdown lampoly 2002-08-26 17:07:46: 4wfrs in load sequence, LL pump off
Message-ID: <mailman.239.1356282340.4111.lampoly-pcs@snf.stanford.edu>




From cbaxter at snf.stanford.edu  Mon Aug 26 06:30:33 2002
From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu)
Date: Aug 26, 2002 6:30:33 PM
Subject: Shutdown lampoly 2002-08-26 17:07:46: 4wfrs in load sequence, LL pump off
Message-ID: <mailman.240.1356282340.4111.lampoly-pcs@snf.stanford.edu>

recover stuck wafer om exit load lock



From aaronp at snf.stanford.edu  Tue Aug 27 02:06:07 2002
From: aaronp at snf.stanford.edu (aaronp at snf.stanford.edu)
Date: Aug 27, 2002 2:06:07 AM
Subject: Shutdown lampoly 2002-08-27 02:06:06: pump problem in load lock, see history
Message-ID: <mailman.241.1356282340.4111.lampoly-pcs@snf.stanford.edu>

please place 2 wafers in box on table



From booth at snf.stanford.edu  Tue Aug 27 07:45:38 2002
From: booth at snf.stanford.edu (booth at snf.stanford.edu)
Date: Aug 27, 2002 7:45:38 AM
Subject: Shutdown lampoly 2002-08-27 02:06:06: pump problem in load lock, see history
Message-ID: <mailman.242.1356282340.4111.lampoly-pcs@snf.stanford.edu>

restarted pump.



From cbaxter at snf.stanford.edu  Wed Aug 28 12:40:16 2002
From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu)
Date: Aug 28, 2002 12:40:16 AM
Subject: Shutdown lampoly 2002-08-28 00:40:15: load lock keep shutting off. overtemp switch tripped.
Message-ID: <mailman.243.1356282340.4111.lampoly-pcs@snf.stanford.edu>