Shutdown lampoly 2002-08-07 12:40:18: loadlock pump failed

cbaxter at snf.stanford.edu cbaxter at snf.stanford.edu
Wed Aug 7 06:44:08 PDT 2002

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found load lock pump off. turn it back on and resumed
wafer on system

Next message: Shutdown lampoly 2002-08-26 13:51:17: wafer stuck in chamber
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