Shutdown lampoly 2002-08-26 13:51:17: wafer stuck in chamber
booth at snf.stanford.edu
booth at snf.stanford.edu
Mon Aug 26 02:43:36 PDT 2002
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Shutdown lampoly 2002-08-26 13:51:17: wafer stuck in chamber
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Shutdown lampoly 2002-08-26 17:07:46: 4wfrs in load sequence, LL pump off
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found loadlock drypump off. Restarted pump.
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Shutdown lampoly 2002-08-26 13:51:17: wafer stuck in chamber
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Shutdown lampoly 2002-08-26 17:07:46: 4wfrs in load sequence, LL pump off
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