Shutdown lampoly 2002-08-27 02:06:06: pump problem in load lock, see history
aaronp at snf.stanford.edu
aaronp at snf.stanford.edu
Tue Aug 27 02:06:07 PDT 2002
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Shutdown lampoly 2002-08-26 17:07:46: 4wfrs in load sequence, LL pump off
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please place 2 wafers in box on table
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