Shutdown lampoly 2002-08-27 02:06:06: pump problem in load lock, see history
booth at snf.stanford.edu
booth at snf.stanford.edu
Tue Aug 27 07:45:38 PDT 2002
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Shutdown lampoly 2002-08-27 02:06:06: pump problem in load lock, see history
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Shutdown lampoly 2002-08-28 00:40:15: load lock keep shutting off. overtemp switch tripped.
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restarted pump.
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Shutdown lampoly 2002-08-27 02:06:06: pump problem in load lock, see history
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Shutdown lampoly 2002-08-28 00:40:15: load lock keep shutting off. overtemp switch tripped.
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