Problem lampoly 2002-02-25 18:12:43: System Alarm

mcvittie at mcvittie at
Mon Feb 25 06:12:46 PST 2002

Dick Crane asked me to look at the Lam because it had gone into alarm all by itself. When I found it,  It had an exhaust alarm. I enabled it and run one wafer using process #1. I found no problems.

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