Problem lampoly 2002-02-25 18:12:43: System Alarm

mcvittie at snf.stanford.edu mcvittie at snf.stanford.edu
Mon Feb 25 06:12:46 PST 2002


Dick Crane asked me to look at the Lam because it had gone into alarm all by itself. When I found it,  It had an exhaust alarm. I enabled it and run one wafer using process #1. I found no problems.
	Jim  




More information about the lampoly-pcs mailing list