Shutdown lampoly 2002-02-25 10:48:32: bias voltage high

mcvittie at snf.stanford.edu mcvittie at snf.stanford.edu
Tue Feb 26 02:55:59 PST 2002


No problem. I ran a poly wafer using program #1 and got an etch rate of 2800 A/m. The bias during etch was about 100V as expected.
	Jim McVittie




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