Shutdown lampoly 2002-02-27 12:16:13: recieving casette stuck

kailash at snf.stanford.edu kailash at snf.stanford.edu
Wed Feb 27 12:16:15 PST 2002


The arm put the wafer tilted on the recieving casette.  The arm is stuck and it is flashing an alarm "recieving casette full". 2 of my wafers are in there




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