Shutdown lampoly 2002-02-27 12:16:13: recieving casette stuck
mcvittie at snf.stanford.edu
mcvittie at snf.stanford.edu
Wed Feb 27 01:55:11 PST 2002
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Shutdown lampoly 2002-02-27 12:16:13: recieving casette stuck
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Problem lampoly 2002-02-28 03:15:32: no recipe in memory
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Got wafer out and run test wafer. jim
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Shutdown lampoly 2002-02-27 12:16:13: recieving casette stuck
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Problem lampoly 2002-02-28 03:15:32: no recipe in memory
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