From hphan at snf.stanford.edu Fri Jan 4 03:03:24 2002 From: hphan at snf.stanford.edu (hphan at snf.stanford.edu) Date: Jan 4, 2002 3:03:24 PM Subject: Shutdown lampoly 2002-01-04 15:03:23: Bias Voltage Too High During Step Three Message-ID: From cbaxter at snf.stanford.edu Mon Jan 7 11:27:59 2002 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Jan 7, 2002 11:27:59 PM Subject: Shutdown lampoly 2002-01-04 15:03:23: Bias Voltage Too High During Step Three Message-ID: changed bad autotune pcb From suzanne at snf.stanford.edu Tue Jan 8 04:47:03 2002 From: suzanne at snf.stanford.edu (suzanne at snf.stanford.edu) Date: Jan 8, 2002 4:47:03 PM Subject: Shutdown lampoly 2002-01-08 16:47:01: alarm #40 Message-ID: From cbaxter at snf.stanford.edu Tue Jan 8 05:13:52 2002 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Jan 8, 2002 5:13:52 PM Subject: Shutdown lampoly 2002-01-08 16:47:01: alarm #40 Message-ID: no alarm system was running From hphan at snf.stanford.edu Wed Jan 9 09:56:29 2002 From: hphan at snf.stanford.edu (hphan at snf.stanford.edu) Date: Jan 9, 2002 9:56:29 AM Subject: Shutdown lampoly 2002-01-09 09:56:28: Load Lock Did Not Pump Down Message-ID: Hi Len: I try to run recipe 1 with some dummy wafers. The load lock didn't pump down. I also clear the alarm couple times. Still, it didn't work at all. Please check, thank you!!!! From cbaxter at snf.stanford.edu Wed Jan 9 10:56:41 2002 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Jan 9, 2002 10:56:41 PM Subject: Shutdown lampoly 2002-01-09 09:56:28: Load Lock Did Not Pump Down Message-ID: founnd air pop out for entrance load lock solenoid. From cbaxter at snf.stanford.edu Tue Jan 15 10:25:35 2002 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Jan 15, 2002 10:25:35 PM Subject: Shutdown lampoly 2002-01-11 17:57:31: alarm 40 Message-ID: changed nupro valve for vent From evelyn at snf.stanford.edu Wed Jan 16 10:10:53 2002 From: evelyn at snf.stanford.edu (evelyn at snf.stanford.edu) Date: Jan 16, 2002 10:10:53 AM Subject: Shutdown lampoly 2002-01-16 10:10:52: won't pumpdown Message-ID: alarm #40....entry loadlock won't pump to crossover From cbaxter at snf.stanford.edu Wed Jan 16 11:23:08 2002 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Jan 16, 2002 11:23:08 PM Subject: Shutdown lampoly 2002-01-16 10:10:52: won't pumpdown Message-ID: changed delay exit valve. From hphan at snf.stanford.edu Thu Jan 24 10:40:06 2002 From: hphan at snf.stanford.edu (hphan at snf.stanford.edu) Date: Jan 24, 2002 10:40:06 AM Subject: Shutdown lampoly 2002-01-24 10:40:05: LL Inner Door Close Sensor Fail Message-ID: From booth at snf.stanford.edu Thu Jan 24 11:10:38 2002 From: booth at snf.stanford.edu (booth at snf.stanford.edu) Date: Jan 24, 2002 11:10:38 AM Subject: Shutdown lampoly 2002-01-24 10:40:05: LL Inner Door Close Sensor Fail Message-ID: There is no sensor fault, the door was not closed. Need to replace XLL inner door solenoid. From hphan at snf.stanford.edu Thu Jan 24 11:17:10 2002 From: hphan at snf.stanford.edu (hphan at snf.stanford.edu) Date: Jan 24, 2002 11:17:10 AM Subject: Problem lampoly 2002-01-24 11:17:08: LL Inner Door May Not Close, Parts Will Replace. Message-ID: From cbaxter at snf.stanford.edu Thu Jan 24 05:30:11 2002 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Jan 24, 2002 5:30:11 PM Subject: Problem lampoly 2002-01-24 11:17:08: LL Inner Door May Not Close, Parts Will Replace. Message-ID: changed double action solenoid. From kidonge at snf.stanford.edu Mon Jan 28 01:49:14 2002 From: kidonge at snf.stanford.edu (kidonge at snf.stanford.edu) Date: Jan 28, 2002 1:49:14 PM Subject: Shutdown lampoly 2002-01-28 13:49:12: 1 wafer in machine alarm 53 Message-ID: The exit arm with wafer ran into the track of the cassette instead of sliding in smoothly. I repositioned the wafer to relieve undo stress on the exit arm but alarm 53 came up saying that the cassette is sensed as full. Now the exit arm will not return. 1 dummy wafer still on arm/in cassette From cbaxter at snf.stanford.edu Mon Jan 28 04:31:21 2002 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Jan 28, 2002 4:31:21 PM Subject: Shutdown lampoly 2002-01-28 13:49:12: 1 wafer in machine alarm 53 Message-ID: wafer was not sense on exit elevator. exit reciever was enable enable reciever and wafer was sense. From isagiv at snf.stanford.edu Tue Jan 29 12:38:20 2002 From: isagiv at snf.stanford.edu (isagiv at snf.stanford.edu) Date: Jan 29, 2002 12:38:20 AM Subject: Problem lampoly 2002-01-29 00:38:18: error 58,88 - entrance arm doesn't respond Message-ID: From booth at snf.stanford.edu Tue Jan 29 11:23:15 2002 From: booth at snf.stanford.edu (booth at snf.stanford.edu) Date: Jan 29, 2002 11:23:15 AM Subject: Problem lampoly 2002-01-29 00:38:18: error 58,88 - entrance arm doesn't respond Message-ID: Re-initialized wafer handling system. Ran one dummy wafer through system with no faults. From rohits at snf.stanford.edu Tue Jan 29 09:58:25 2002 From: rohits at snf.stanford.edu (rohits at snf.stanford.edu) Date: Jan 29, 2002 9:58:25 PM Subject: Shutdown lampoly 2002-01-29 21:58:22: alarm 53 exit cassette sensed full Message-ID: While unloading the first wafer. the arm did not placed it cross-slotted. Also, the arm has not retracted. I have disabled and shutdown the machine. 2 of my wafers are still in the machine From cbaxter at snf.stanford.edu Tue Jan 29 10:37:48 2002 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Jan 29, 2002 10:37:48 PM Subject: Shutdown lampoly 2002-01-29 21:58:22: alarm 53 exit cassette sensed full Message-ID: reset reciever cassette