Shutdown lampoly 2002-07-01 16:55:46: machine froze up in middle of run&1 wafer is in chamber

booth at snf.stanford.edu booth at snf.stanford.edu
Tue Jul 2 07:39:56 PDT 2002

Previous message: Shutdown lampoly 2002-07-01 16:55:46: machine froze up in middle of run&1 wafer is in chamber
Next message: Problem lampoly 2002-07-02 07:39:04: Unexplained machine re-booting
Messages sorted by: [ date ] [ thread ] [ subject ] [ author ]

intermittant problem, only use for non-critical
wafers.

Previous message: Shutdown lampoly 2002-07-01 16:55:46: machine froze up in middle of run&1 wafer is in chamber
Next message: Problem lampoly 2002-07-02 07:39:04: Unexplained machine re-booting
Messages sorted by: [ date ] [ thread ] [ subject ] [ author ]

More information about the lampoly-pcs mailing list