From booth at snf.stanford.edu  Tue Jun 25 07:22:12 2002
From: booth at snf.stanford.edu (booth at snf.stanford.edu)
Date: Jun 25, 2002 7:22:12 AM
Subject: Shutdown lampoly 2002-06-25 07:22:11: gas line test
Message-ID: <mailman.219.1356282340.4111.lampoly-pcs@snf.stanford.edu>




From seymour at snf.stanford.edu  Wed Jun 26 07:49:32 2002
From: seymour at snf.stanford.edu (seymour at snf.stanford.edu)
Date: Jun 26, 2002 7:49:32 AM
Subject: Shutdown lampoly 2002-06-25 07:22:11: gas line test
Message-ID: <mailman.220.1356282340.4111.lampoly-pcs@snf.stanford.edu>

Leak checks passed



From hanjun at snf.stanford.edu  Thu Jun 27 04:16:25 2002
From: hanjun at snf.stanford.edu (hanjun at snf.stanford.edu)
Date: Jun 27, 2002 4:16:25 PM
Subject: Shutdown lampoly 2002-06-27 16:16:24: wafer in the LL
Message-ID: <mailman.221.1356282340.4111.lampoly-pcs@snf.stanford.edu>

Loadlock arm in the outlet chamber failed to deliver the wafer to the cassette. The chamber is currently with two of the serially processed wafers.



From mcvittie at snf.stanford.edu  Thu Jun 27 06:13:05 2002
From: mcvittie at snf.stanford.edu (mcvittie at snf.stanford.edu)
Date: Jun 27, 2002 6:13:05 PM
Subject: Shutdown lampoly 2002-06-27 16:16:24: wafer in the LL
Message-ID: <mailman.222.1356282340.4111.lampoly-pcs@snf.stanford.edu>

Found 2 wafer off of arm in exit LL. Opened exit LL and 
removed wafers. After clearing system, ran 3 dummy wafers 
with no problems.
	Jim