Shutdown lampoly 2002-06-27 16:16:24: wafer in the LL

mcvittie at snf.stanford.edu mcvittie at snf.stanford.edu
Thu Jun 27 06:13:05 PDT 2002


Found 2 wafer off of arm in exit LL. Opened exit LL and 
removed wafers. After clearing system, ran 3 dummy wafers 
with no problems.
	Jim




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