From zappe at snf.stanford.edu Sat Mar 2 07:09:48 2002 From: zappe at snf.stanford.edu (zappe at snf.stanford.edu) Date: Mar 2, 2002 7:09:48 PM Subject: Problem lampoly 2002-03-02 19:09:47: Sudden Alarm Message-ID: An alarm (annoying beep beep beep) started at 7PM on Saturday 03/02. Machine was not enabled and not in use by any operator. From aaronp at snf.stanford.edu Mon Mar 4 02:54:27 2002 From: aaronp at snf.stanford.edu (aaronp at snf.stanford.edu) Date: Mar 4, 2002 2:54:27 PM Subject: Problem lampoly 2002-03-04 14:54:26: problems with plasma error on main etch. Message-ID: From booth at snf.stanford.edu Tue Mar 5 06:57:18 2002 From: booth at snf.stanford.edu (booth at snf.stanford.edu) Date: Mar 5, 2002 6:57:18 AM Subject: Problem lampoly 2002-02-28 15:17:29: eprom error ... again Message-ID: From booth at snf.stanford.edu Tue Mar 5 06:57:21 2002 From: booth at snf.stanford.edu (booth at snf.stanford.edu) Date: Mar 5, 2002 6:57:21 AM Subject: Problem lampoly 2002-03-02 19:09:47: Sudden Alarm Message-ID: From booth at snf.stanford.edu Tue Mar 5 06:57:45 2002 From: booth at snf.stanford.edu (booth at snf.stanford.edu) Date: Mar 5, 2002 6:57:45 AM Subject: Problem lampoly 2002-03-04 14:54:26: problems with plasma error on main etch. Message-ID: Cesar tested system - OK. From booth at snf.stanford.edu Tue Mar 5 06:58:48 2002 From: booth at snf.stanford.edu (booth at snf.stanford.edu) Date: Mar 5, 2002 6:58:48 AM Subject: Shutdown lampoly 2002-03-05 06:58:48: maintenance Message-ID: From booth at snf.stanford.edu Tue Mar 5 03:40:12 2002 From: booth at snf.stanford.edu (booth at snf.stanford.edu) Date: Mar 5, 2002 3:40:12 PM Subject: Shutdown lampoly 2002-03-05 06:58:48: maintenance Message-ID: From bchui at snf.stanford.edu Wed Mar 6 05:18:22 2002 From: bchui at snf.stanford.edu (bchui at snf.stanford.edu) Date: Mar 6, 2002 5:18:22 PM Subject: Problem lampoly 2002-03-06 17:18:19: RF power on exceeded hard limit Message-ID: happened a few seconds into step 5. Did it twice. From cbaxter at snf.stanford.edu Wed Mar 6 08:17:49 2002 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Mar 6, 2002 8:17:49 PM Subject: Problem lampoly 2002-03-06 17:18:19: RF power on exceeded hard limit Message-ID: ran recipe #27 without a problem From booth at snf.stanford.edu Mon Mar 11 07:13:08 2002 From: booth at snf.stanford.edu (booth at snf.stanford.edu) Date: Mar 11, 2002 7:13:08 AM Subject: Shutdown lampoly 2002-03-11 07:13:07: pump maintenance Message-ID: From booth at snf.stanford.edu Mon Mar 11 11:19:11 2002 From: booth at snf.stanford.edu (booth at snf.stanford.edu) Date: Mar 11, 2002 11:19:11 AM Subject: Shutdown lampoly 2002-03-11 07:13:07: pump maintenance Message-ID: added 25/6 fomblin to LoadLock dry pump gearbox. From khanh at snf.stanford.edu Tue Mar 12 04:35:17 2002 From: khanh at snf.stanford.edu (khanh at snf.stanford.edu) Date: Mar 12, 2002 4:35:17 PM Subject: Shutdown lampoly 2002-03-12 16:35:16: loader error Message-ID: The loader picks up 2 wafer at the same time. From cbaxter at snf.stanford.edu Tue Mar 12 07:01:26 2002 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Mar 12, 2002 7:01:26 PM Subject: Shutdown lampoly 2002-03-12 16:35:16: loader error Message-ID: removed broken wafer inside the chamber. From evelyn at snf.stanford.edu Wed Mar 20 10:27:59 2002 From: evelyn at snf.stanford.edu (evelyn at snf.stanford.edu) Date: Mar 20, 2002 10:27:59 AM Subject: Shutdown lampoly 2002-03-20 10:27:59: entrance load failed Message-ID: wafer still on arm......entrance load failed requested rotate action. From booth at snf.stanford.edu Wed Mar 20 11:10:49 2002 From: booth at snf.stanford.edu (booth at snf.stanford.edu) Date: Mar 20, 2002 11:10:49 AM Subject: Shutdown lampoly 2002-03-20 10:27:59: entrance load failed Message-ID: re-initialized wafer transport, removed wafer from system, dummy wafer ran fine. From etruscan at snf.stanford.edu Thu Mar 21 09:41:05 2002 From: etruscan at snf.stanford.edu (etruscan at snf.stanford.edu) Date: Mar 21, 2002 9:41:05 AM Subject: Problem lampoly 2002-03-21 09:41:03: lam Message-ID: system alarms when doing main etch on recipe 1. RF hard tolerance exceeded. From hphan at snf.stanford.edu Thu Mar 21 10:01:37 2002 From: hphan at snf.stanford.edu (hphan at snf.stanford.edu) Date: Mar 21, 2002 10:01:37 AM Subject: Shutdown lampoly 2002-03-21 10:01:37: RF Reflect Too High (More Than !0%) Message-ID: