From khanh at snf.stanford.edu  Thu May 23 10:11:18 2002
From: khanh at snf.stanford.edu (khanh at snf.stanford.edu)
Date: May 23, 2002 10:11:18 AM
Subject: Problem lampoly 2002-05-23 10:11:18: Wafer loader arm problem
Message-ID: <mailman.209.1356282340.4111.lampoly-pcs@snf.stanford.edu>

Message display: wafer not sense at exit



From khanh at snf.stanford.edu  Thu May 23 10:29:27 2002
From: khanh at snf.stanford.edu (khanh at snf.stanford.edu)
Date: May 23, 2002 10:29:27 AM
Subject: Shutdown lampoly 2002-05-23 10:29:26: Auto loader sense at exit cassette
Message-ID: <mailman.210.1356282340.4111.lampoly-pcs@snf.stanford.edu>




From booth at snf.stanford.edu  Thu May 23 11:04:15 2002
From: booth at snf.stanford.edu (booth at snf.stanford.edu)
Date: May 23, 2002 11:04:15 AM
Subject: Shutdown lampoly 2002-05-23 10:29:26: Auto loader sense at exit cassette
Message-ID: <mailman.211.1356282340.4111.lampoly-pcs@snf.stanford.edu>

user khanh ran 3 dummy wafers successfully,
then loaded 1 process wafer that had some crud
on the backside.  I think the exit casette could
not get the LED sensor to see the dirty backside
of the wafer.  I removed the dirty wafer from the
exit arm.



From booth at snf.stanford.edu  Thu May 23 11:06:17 2002
From: booth at snf.stanford.edu (booth at snf.stanford.edu)
Date: May 23, 2002 11:06:17 AM
Subject: Problem lampoly 2002-05-23 10:11:18: Wafer loader arm problem
Message-ID: <mailman.212.1356282340.4111.lampoly-pcs@snf.stanford.edu>




From khanh at snf.stanford.edu  Thu May 23 02:40:44 2002
From: khanh at snf.stanford.edu (khanh at snf.stanford.edu)
Date: May 23, 2002 2:40:44 PM
Subject: Shutdown lampoly 2002-05-23 14:40:43: Wafer not sense at exit cassette
Message-ID: <mailman.213.1356282340.4111.lampoly-pcs@snf.stanford.edu>




From booth at snf.stanford.edu  Thu May 23 02:59:39 2002
From: booth at snf.stanford.edu (booth at snf.stanford.edu)
Date: May 23, 2002 2:59:39 PM
Subject: Shutdown lampoly 2002-05-23 14:40:43: Wafer not sense at exit cassette
Message-ID: <mailman.214.1356282340.4111.lampoly-pcs@snf.stanford.edu>

Same problem as this morning - wafer
not sensed at receive cassette (still on arm)
Removed wafer from arm & cleaned sense
LEDs on elevator.  May be related to film
stack on back of these wafers because dummys
go thru system just fine.



From khanh at snf.stanford.edu  Thu May 23 03:31:24 2002
From: khanh at snf.stanford.edu (khanh at snf.stanford.edu)
Date: May 23, 2002 3:31:24 PM
Subject: Shutdown lampoly 2002-05-23 15:31:24: wafer not sense at exit cassette
Message-ID: <mailman.215.1356282340.4111.lampoly-pcs@snf.stanford.edu>




From cbaxter at snf.stanford.edu  Thu May 23 04:56:07 2002
From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu)
Date: May 23, 2002 4:56:07 PM
Subject: Shutdown lampoly 2002-05-23 15:31:24: wafer not sense at exit cassette
Message-ID: <mailman.216.1356282340.4111.lampoly-pcs@snf.stanford.edu>

removed wafer on exit cassette. I adjusted the wafer
sensor to sense the wafer



From booth at snf.stanford.edu  Fri May 24 10:25:28 2002
From: booth at snf.stanford.edu (booth at snf.stanford.edu)
Date: May 24, 2002 10:25:28 AM
Subject: Shutdown lampoly 2002-05-24 10:25:27: wafer lost in etch chamber
Message-ID: <mailman.217.1356282340.4111.lampoly-pcs@snf.stanford.edu>

need to vent chamber to remove wafer.



From cbaxter at snf.stanford.edu  Fri May 24 08:07:00 2002
From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu)
Date: May 24, 2002 8:07:00 PM
Subject: Shutdown lampoly 2002-05-24 10:25:27: wafer lost in etch chamber
Message-ID: <mailman.218.1356282340.4111.lampoly-pcs@snf.stanford.edu>

removed wafer and wet cleaned chamber. ran 5 wafer
bare silicon to condition chamber