Problem lampoly 2002-05-23 10:11:18: Wafer loader arm problem
khanh at snf.stanford.edu
khanh at snf.stanford.edu
Thu May 23 10:11:18 PDT 2002
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Shutdown lampoly 2002-05-23 15:31:24: wafer not sense at exit cassette
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Problem lampoly 2002-05-23 10:11:18: Wafer loader arm problem
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Message display: wafer not sense at exit
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Shutdown lampoly 2002-05-23 15:31:24: wafer not sense at exit cassette
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Problem lampoly 2002-05-23 10:11:18: Wafer loader arm problem
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