Shutdown lampoly 2002-05-23 10:29:26: Auto loader sense at exit cassette

booth at snf.stanford.edu booth at snf.stanford.edu
Thu May 23 11:04:15 PDT 2002


user khanh ran 3 dummy wafers successfully,
then loaded 1 process wafer that had some crud
on the backside.  I think the exit casette could
not get the LED sensor to see the dirty backside
of the wafer.  I removed the dirty wafer from the
exit arm.




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