Shutdown lampoly 2002-05-23 14:40:43: Wafer not sense at exit cassette

booth at snf.stanford.edu booth at snf.stanford.edu
Thu May 23 02:59:39 PDT 2002


Same problem as this morning - wafer
not sensed at receive cassette (still on arm)
Removed wafer from arm & cleaned sense
LEDs on elevator.  May be related to film
stack on back of these wafers because dummys
go thru system just fine.




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