Shutdown lampoly 2002-05-23 14:40:43: Wafer not sense at exit cassette

booth at booth at
Thu May 23 02:59:39 PDT 2002

Same problem as this morning - wafer
not sensed at receive cassette (still on arm)
Removed wafer from arm & cleaned sense
LEDs on elevator.  May be related to film
stack on back of these wafers because dummys
go thru system just fine.

More information about the lampoly-pcs mailing list