May 2002 Archives by date

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Starting: Thu May 23 02:40:44 PDT 2002
Ending: Fri May 24 10:25:28 PDT 2002
Messages: 10

• Shutdown lampoly 2002-05-23 14:40:43: Wafer not sense at exit cassette   khanh at snf.stanford.edu
• Shutdown lampoly 2002-05-23 14:40:43: Wafer not sense at exit cassette   booth at snf.stanford.edu
• Shutdown lampoly 2002-05-23 15:31:24: wafer not sense at exit cassette   khanh at snf.stanford.edu
• Shutdown lampoly 2002-05-23 15:31:24: wafer not sense at exit cassette   cbaxter at snf.stanford.edu
• Problem lampoly 2002-05-23 10:11:18: Wafer loader arm problem   khanh at snf.stanford.edu
• Shutdown lampoly 2002-05-23 10:29:26: Auto loader sense at exit cassette   khanh at snf.stanford.edu
• Shutdown lampoly 2002-05-23 10:29:26: Auto loader sense at exit cassette   booth at snf.stanford.edu
• Problem lampoly 2002-05-23 10:11:18: Wafer loader arm problem   booth at snf.stanford.edu
• Shutdown lampoly 2002-05-24 10:25:27: wafer lost in etch chamber   cbaxter at snf.stanford.edu
• Shutdown lampoly 2002-05-24 10:25:27: wafer lost in etch chamber   booth at snf.stanford.edu

Last message date: Fri May 24 10:25:28 PDT 2002
Archived on: Sun Dec 23 09:06:00 PST 2012

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