From rajesh at snf.stanford.edu  Mon Nov 11 12:18:04 2002
From: rajesh at snf.stanford.edu (rajesh at snf.stanford.edu)
Date: Nov 11, 2002 12:18:04 PM
Subject: Shutdown lampoly 2002-11-11 12:18:03: Alarm 57
Message-ID: <mailman.257.1356282340.4111.lampoly-pcs@snf.stanford.edu>

Shuttle failed request to move to home position.  I ran quite a few wafers and then I loaded one wafer and hit start. It gave this error and hung. wafer is still in the load cassette



From booth at snf.stanford.edu  Mon Nov 11 01:15:49 2002
From: booth at snf.stanford.edu (booth at snf.stanford.edu)
Date: Nov 11, 2002 1:15:49 PM
Subject: Shutdown lampoly 2002-11-11 12:18:03: Alarm 57
Message-ID: <mailman.258.1356282340.4111.lampoly-pcs@snf.stanford.edu>

reinitialized wafer transport system.