Shutdown lampoly 2002-11-11 12:18:03: Alarm 57

rajesh at snf.stanford.edu rajesh at snf.stanford.edu
Mon Nov 11 12:18:04 PST 2002


Shuttle failed request to move to home position.  I ran quite a few wafers and then I loaded one wafer and hit start. It gave this error and hung. wafer is still in the load cassette




More information about the lampoly-pcs mailing list