From cbaxter at snf.stanford.edu  Thu Sep 12 12:19:46 2002
From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu)
Date: Sep 12, 2002 12:19:46 AM
Subject: Shutdown lampoly 2002-08-28 00:40:15: load lock keep shutting off. overtemp switch tripped.
Message-ID: <mailman.244.1356282340.4111.lampoly-pcs@snf.stanford.edu>

pump has been rebuild.  



From cbaxter at snf.stanford.edu  Thu Sep 12 12:22:50 2002
From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu)
Date: Sep 12, 2002 12:22:50 AM
Subject: Shutdown lampoly 2002-09-12 00:22:48: tool still on shutdown, to install pump bracket
Message-ID: <mailman.245.1356282340.4111.lampoly-pcs@snf.stanford.edu>




From booth at snf.stanford.edu  Thu Sep 12 09:04:38 2002
From: booth at snf.stanford.edu (booth at snf.stanford.edu)
Date: Sep 12, 2002 9:04:38 AM
Subject: Problem lampoly 2002-07-12 14:33:12: floppy drive not available
Message-ID: <mailman.246.1356282340.4111.lampoly-pcs@snf.stanford.edu>

new drives installed & recipes moved.



From booth at snf.stanford.edu  Thu Sep 12 09:05:13 2002
From: booth at snf.stanford.edu (booth at snf.stanford.edu)
Date: Sep 12, 2002 9:05:13 AM
Subject: Shutdown lampoly 2002-09-12 00:22:48: tool still on shutdown, to install pump bracket
Message-ID: <mailman.247.1356282340.4111.lampoly-pcs@snf.stanford.edu>

machined LoadLock pump mounting bar to clear exhaust
piping.



From booth at snf.stanford.edu  Thu Sep 12 09:05:40 2002
From: booth at snf.stanford.edu (booth at snf.stanford.edu)
Date: Sep 12, 2002 9:05:40 AM
Subject: Shutdown lampoly 2002-09-12 09:05:39: ready for process verification
Message-ID: <mailman.248.1356282340.4111.lampoly-pcs@snf.stanford.edu>




From hphan at snf.stanford.edu  Thu Sep 12 12:59:11 2002
From: hphan at snf.stanford.edu (hphan at snf.stanford.edu)
Date: Sep 12, 2002 12:59:11 PM
Subject: Shutdown lampoly 2002-09-12 09:05:39: System is up
Message-ID: <mailman.249.1356282340.4111.lampoly-pcs@snf.stanford.edu>

Ran a seasoning with silicon wafers, then a process recipe #1 with Poly wafer. Uniformity is 5% across the wafer.



From evelyn at snf.stanford.edu  Thu Sep 26 10:05:08 2002
From: evelyn at snf.stanford.edu (evelyn at snf.stanford.edu)
Date: Sep 26, 2002 10:05:08 AM
Subject: Shutdown lampoly 2002-09-26 10:05:06: wafer broke
Message-ID: <mailman.250.1356282340.4111.lampoly-pcs@snf.stanford.edu>

wafer broke coming out of loadlock onto the cassette



From evelyn at snf.stanford.edu  Thu Sep 26 10:20:48 2002
From: evelyn at snf.stanford.edu (evelyn at snf.stanford.edu)
Date: Sep 26, 2002 10:20:48 AM
Subject: Comment lampoly 2002-09-26 10:20:47: concerning shutdown
Message-ID: <mailman.251.1356282340.4111.lampoly-pcs@snf.stanford.edu>

also, there is a processing wafer of mine in the entry loadlock and only one wafer on the exit cassette.....



From cbaxter at snf.stanford.edu  Thu Sep 26 07:58:20 2002
From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu)
Date: Sep 26, 2002 7:58:20 PM
Subject: Shutdown lampoly 2002-09-26 10:05:06: wafer broke
Message-ID: <mailman.252.1356282340.4111.lampoly-pcs@snf.stanford.edu>

cleaned up broken wafer and vacuum wafer chips
on exit load lock and receiver cassette