From hanjun at snf.stanford.edu Thu Apr 3 09:31:16 2003 From: hanjun at snf.stanford.edu (hanjun at snf.stanford.edu) Date: Apr 3, 2003 9:31:16 AM Subject: Shutdown lampoly 2003-04-03 09:31:15: mislocating wafer Message-ID: The equipment misplaced the wafer when unloading to the cassette, and got stuck! There were two wafers unremoved from the previous run, and the wafer handle attempted to locate the wafer to the third slot. From booth at snf.stanford.edu Thu Apr 3 09:39:49 2003 From: booth at snf.stanford.edu (booth at snf.stanford.edu) Date: Apr 3, 2003 9:39:49 AM Subject: Shutdown lampoly 2003-04-03 09:31:15: Report Clear for lampoly Message-ID: Hanjun had already etched two wafers, and left them in the receive cassette. He loaded a third wafer into the send cassette & etched it. The exit loadlock arm seemed to try to put the third wafer into the second slot of the receive cassette. I removed the wafers & he is going to try another wafer. From hanjun at snf.stanford.edu Sat Apr 12 03:21:45 2003 From: hanjun at snf.stanford.edu (hanjun at snf.stanford.edu) Date: Apr 12, 2003 3:21:45 AM Subject: Problem lampoly 2003-04-12 03:21:45: Report Problem for lampoly Message-ID: "Alarm: failure to move shuttle to home position" Loadlocks, handles, and cassettes worked very well and normal for hours, and then suddenly got this alarm... All the procedures and process was just normal at the time this alarm came. Still puzzled what this fault is about..?? From ericp at snf.stanford.edu Sat Apr 12 08:47:19 2003 From: ericp at snf.stanford.edu (ericp at snf.stanford.edu) Date: Apr 12, 2003 8:47:19 PM Subject: Shutdown lampoly 2003-04-12 20:47:18: Loader not operating Message-ID: The loader operated once, and then quit as described by the previous user. On the failed attempt, the arm (external arm, not the internal one) came out as if to grab the wafer from the cassette, then retreated to the very rear of available travel, and then gave the alarm "Unable to move to home position". This is the alarm currently on the machine. From booth at snf.stanford.edu Mon Apr 14 02:42:15 2003 From: booth at snf.stanford.edu (booth at snf.stanford.edu) Date: Apr 14, 2003 2:42:15 PM Subject: Problem lampoly 2003-04-12 03:21:45: Report Clear for lampoly Message-ID: This is a good description of what hanjun observed, but it should be a shutdown. From booth at snf.stanford.edu Mon Apr 14 02:43:36 2003 From: booth at snf.stanford.edu (booth at snf.stanford.edu) Date: Apr 14, 2003 2:43:36 PM Subject: Shutdown lampoly 2003-04-12 20:47:18: Report Clear for lampoly Message-ID: lubed wafer transport & re-aligned parts. From hanjun at snf.stanford.edu Thu Apr 17 01:09:26 2003 From: hanjun at snf.stanford.edu (hanjun at snf.stanford.edu) Date: Apr 17, 2003 1:09:26 AM Subject: Shutdown lampoly 2003-04-17 01:09:25: Report Shutdown for lampoly Message-ID: I happened to touch the top of the receiver cassette lightly by accident while changing the menu (from status to recipe). The receiver index doesn't recognize the cassette, resulting the arm to stuck with the exit door open. I'm sorry about this mistake... From booth at snf.stanford.edu Thu Apr 17 07:00:34 2003 From: booth at snf.stanford.edu (booth at snf.stanford.edu) Date: Apr 17, 2003 7:00:34 AM Subject: Shutdown lampoly 2003-04-17 01:09:25: Report Clear for lampoly Message-ID: unloaded wafer from exit loadlock arm. Receive indexer was disabled. Need to ask Hanjun exactly what he did - maybe he removed the cassette during unload? From gyama at snf.stanford.edu Mon Apr 28 02:37:05 2003 From: gyama at snf.stanford.edu (gyama at snf.stanford.edu) Date: Apr 28, 2003 2:37:05 PM Subject: Problem lampoly 2003-04-28 14:37:04: Report Problem for lampoly Message-ID: alarm 184, water chiller has failed From cbaxter at snf.stanford.edu Mon Apr 28 05:15:07 2003 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Apr 28, 2003 5:15:07 PM Subject: Problem lampoly 2003-04-28 14:37:04: Report Clear for lampoly Message-ID: heat exchanger lower on h2o. refilled.