Shutdown lampoly 2003-04-03 09:31:15: mislocating wafer

hanjun at snf.stanford.edu hanjun at snf.stanford.edu
Thu Apr 3 09:31:16 PST 2003


The equipment misplaced the wafer when unloading to the cassette, and got stuck!  There were two wafers unremoved from the previous run, and the wafer handle attempted to locate the wafer to the third slot.




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