Shutdown lampoly 2003-04-03 09:31:15: Report Clear for lampoly

booth at snf.stanford.edu booth at snf.stanford.edu
Thu Apr 3 09:39:49 PST 2003


Hanjun had already etched two wafers, and left them in the
receive cassette.  He loaded a third wafer into the send
cassette & etched it.  The exit loadlock arm seemed to try
to put the third wafer into the second slot of the receive 
cassette.  I removed the wafers & he is going to try another
wafer.




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