Shutdown lampoly 2003-04-17 01:09:25: Report Clear for lampoly

booth at snf.stanford.edu booth at snf.stanford.edu
Thu Apr 17 07:00:34 PDT 2003


unloaded wafer from exit loadlock arm.
Receive indexer was disabled.
Need to ask Hanjun exactly what he did -
maybe he removed the cassette during unload?




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