From cbaxter at snf.stanford.edu  Fri Aug  1 10:27:33 2003
From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu)
Date: Aug 1, 2003 10:27:33 AM
Subject: Shutdown lampoly 2003-08-01 10:27:32: Report Shutdown for lampoly
Message-ID: <mailman.303.1356282340.4111.lampoly-pcs@snf.stanford.edu>

chamber shutdown for wet clean



From cbaxter at snf.stanford.edu  Fri Aug  1 01:46:31 2003
From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu)
Date: Aug 1, 2003 1:46:31 PM
Subject: Shutdown lampoly 2003-08-01 10:27:32: Report Clear for lampoly
Message-ID: <mailman.304.1356282340.4111.lampoly-pcs@snf.stanford.edu>

completed chamber wet clean and ran 2 wafer conditioning