From rcrane at snf.stanford.edu  Thu Jan  2 03:45:33 2003
From: rcrane at snf.stanford.edu (rcrane at snf.stanford.edu)
Date: Jan 2, 2003 3:45:33 PM
Subject: Problem lampoly 2003-01-02 15:45:32: ok to use, needs qual run
Message-ID: <mailman.261.1356282340.4111.lampoly-pcs@snf.stanford.edu>




From hphan at snf.stanford.edu  Mon Jan  6 03:32:06 2003
From: hphan at snf.stanford.edu (hphan at snf.stanford.edu)
Date: Jan 6, 2003 3:32:06 PM
Subject: Problem lampoly 2003-01-02 15:45:32: Ready to use
Message-ID: <mailman.262.1356282340.4111.lampoly-pcs@snf.stanford.edu>

Run a poly test. Etch rate cross wafer is less than 5%



From rohits at snf.stanford.edu  Fri Jan 10 04:10:45 2003
From: rohits at snf.stanford.edu (rohits at snf.stanford.edu)
Date: Jan 10, 2003 4:10:45 PM
Subject: Problem lampoly 2003-01-10 16:10:43: Alarm #81
Message-ID: <mailman.263.1356282340.4111.lampoly-pcs@snf.stanford.edu>

RF tolerance exceeds hard limits during on step (step 7)



From cbaxter at snf.stanford.edu  Fri Jan 10 04:54:38 2003
From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu)
Date: Jan 10, 2003 4:54:38 PM
Subject: Problem lampoly 2003-01-10 16:10:43: Alarm #81
Message-ID: <mailman.264.1356282340.4111.lampoly-pcs@snf.stanford.edu>

cleared alarm.