Problem lampoly 2003-01-02 15:45:32: Ready to use
hphan at snf.stanford.edu
hphan at snf.stanford.edu
Mon Jan 6 03:32:06 PST 2003
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Problem lampoly 2003-01-02 15:45:32: ok to use, needs qual run
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Problem lampoly 2003-01-10 16:10:43: Alarm #81
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Run a poly test. Etch rate cross wafer is less than 5%
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Problem lampoly 2003-01-02 15:45:32: ok to use, needs qual run
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Problem lampoly 2003-01-10 16:10:43: Alarm #81
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