From hphan at snf.stanford.edu Wed Mar 5 09:04:03 2003 From: hphan at snf.stanford.edu (Henry Phan) Date: Wed, 05 Mar 2003 09:04:03 -0800 Subject: Updated Etch Rate and Operating procedure Message-ID: <3E662E03.B63BD5C5@snf.stanford.edu> Dear Users: In the past few weeks, I've been re-checking and updating the etch rate data for both dryteks and the amtetcher. I have also made some changes in the operating procedures. You will find these new documents in the log books. Please don't make any changes or write on the recipes posted in the logbooks. If you think a change should be made to either the etchrates or the operating procedures come see me. I find it disrespectful to both me and the other users of the equipment for anyone to squabble changes on the log sheets as has happened at the amtetcher. This information is not updated on the website if it does not go through me. Also, if you want to change the base pressure on the AMT, that's fine. But please put the pressure back to the standard one when you finish your process and do not write on the recipe. You are welcome to talk to me if you have any recommendations. From hsiung at snf.stanford.edu Fri Mar 14 10:56:26 2003 From: hsiung at snf.stanford.edu (hsiung at snf.stanford.edu) Date: Mar 14, 2003 10:56:26 AM Subject: Shutdown lampoly 2003-03-14 10:56:25: Report Shutdown for lampoly Message-ID: wafer stuck at exit cassette another wafer finished process and waiting in the chamber From cbaxter at snf.stanford.edu Fri Mar 14 05:23:28 2003 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Mar 14, 2003 5:23:28 PM Subject: Shutdown lampoly 2003-03-14 10:56:25: Report Clear for lampoly Message-ID: recovered wafer on receiver. user wafer has film on back of his wafer. receiver wafer detector is not sensitive enough to detect his wafer.. From hsiung at snf.stanford.edu Sun Mar 16 04:04:14 2003 From: hsiung at snf.stanford.edu (hsiung at snf.stanford.edu) Date: Mar 16, 2003 4:04:14 PM Subject: Shutdown lampoly 2003-03-16 16:04:13: Report Shutdown for lampoly Message-ID: shuttle failed request to move to home position in the inintial checkup after started the run From booth at snf.stanford.edu Mon Mar 17 08:58:45 2003 From: booth at snf.stanford.edu (booth at snf.stanford.edu) Date: Mar 17, 2003 8:58:45 AM Subject: Shutdown lampoly 2003-03-16 16:04:13: Report Clear for lampoly Message-ID: had to reinitialize wafer transport. From cbaxter at snf.stanford.edu Tue Mar 25 07:47:21 2003 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Mar 25, 2003 7:47:21 PM Subject: Shutdown lampoly 2003-03-25 19:47:18: Report Shutdown for lampoly Message-ID: chamber due for wet clean From cbaxter at snf.stanford.edu Tue Mar 25 10:50:20 2003 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Mar 25, 2003 10:50:20 PM Subject: Shutdown lampoly 2003-03-25 19:47:18: Report Clear for lampoly Message-ID: completed wet cleaned