From booth at snf.stanford.edu Mon May 5 06:28:28 2003 From: booth at snf.stanford.edu (booth at snf.stanford.edu) Date: May 5, 2003 6:28:28 AM Subject: Shutdown lampoly 2003-05-05 06:28:27: Report Shutdown for lampoly Message-ID: water lead at turbo backing pump From booth at snf.stanford.edu Mon May 5 07:32:38 2003 From: booth at snf.stanford.edu (booth at snf.stanford.edu) Date: May 5, 2003 7:32:38 AM Subject: Shutdown lampoly 2003-05-05 06:28:27: Report Clear for lampoly Message-ID: Replaced 1/2" PCW polyflow line to LoadLock pump. From bchui at snf.stanford.edu Tue May 6 05:43:50 2003 From: bchui at snf.stanford.edu (bchui at snf.stanford.edu) Date: May 6, 2003 5:43:50 PM Subject: Shutdown lampoly 2003-05-06 17:43:49: Exit cassette not sensed Message-ID: Error 52 "Exit cassette sense not ready" occurs even though cassette is in place From booth at snf.stanford.edu Wed May 7 07:27:38 2003 From: booth at snf.stanford.edu (booth at snf.stanford.edu) Date: May 7, 2003 7:27:38 AM Subject: Shutdown lampoly 2003-05-06 17:43:49: Report Clear for lampoly Message-ID: removed 3 of Ben's wafers. Looks like there is an intermittant problem with the receive indexer. From sjain at snf.stanford.edu Wed May 14 03:03:22 2003 From: sjain at snf.stanford.edu (sjain at snf.stanford.edu) Date: May 14, 2003 3:03:22 AM Subject: Shutdown lampoly 2003-05-14 03:03:21: Report Shutdown for lampoly Message-ID: 5 bare Si dummy wafers coming out of the lampoly (recipe 25)had some sort of deposit on the wafer (put down during the etch presumably). Sample wafer has been left at the lampoly. From cbaxter at snf.stanford.edu Wed May 14 10:17:30 2003 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: May 14, 2003 10:17:30 PM Subject: Shutdown lampoly 2003-05-14 03:03:21: Report Clear for lampoly Message-ID: vented chamber and wet cleaned. tool is ready for conditioning From booth at snf.stanford.edu Thu May 15 07:20:46 2003 From: booth at snf.stanford.edu (booth at snf.stanford.edu) Date: May 15, 2003 7:20:46 AM Subject: Problem lampoly 2003-05-15 07:20:45: Report Problem for lampoly Message-ID: Etch chamber has been wet cleaned. It needs to be seasoned before standard etch results can be expected. From gyama at snf.stanford.edu Thu May 15 09:18:53 2003 From: gyama at snf.stanford.edu (gyama at snf.stanford.edu) Date: May 15, 2003 9:18:53 AM Subject: Shutdown lampoly 2003-05-15 09:18:52: Report Shutdown for lampoly Message-ID: 3 wafers stuck in machine, 1) in enter chamber load lock, not sitting in load arm pocket, 2) wafer in chamber, halted in step 8, 3) wafer in exit cassette, but arm not retracting From cbaxter at snf.stanford.edu Thu May 15 07:49:47 2003 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: May 15, 2003 7:49:47 PM Subject: Shutdown lampoly 2003-05-15 09:18:52: Report Clear for lampoly Message-ID: removed stucked wafer on chamber and wet cleaned From cbaxter at snf.stanford.edu Thu May 15 10:00:53 2003 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: May 15, 2003 10:00:53 PM Subject: Problem lampoly 2003-05-15 07:20:45: Report Clear for lampoly Message-ID: I ran 20 mins conditionig wafers. system is seasoned From ericp at snf.stanford.edu Sun May 25 03:06:02 2003 From: ericp at snf.stanford.edu (ericp at snf.stanford.edu) Date: May 25, 2003 3:06:02 AM Subject: Shutdown lampoly 2003-05-25 03:06:01: Lockup Message-ID: While process was running, system froze. That is, the clock stopped ticking, and the front panel did not respond at all to any button presses. Plasma remained ON, though. Plasma did not shut off even well after it should have (if the clock had continued ticking). I did not want to leave the machine running with Plasma on indefinately, so I pushed the small power off button on the front panel and turned off the turbo at the back. Turbo gracefully and quietly spun down. WAFER IS IN CHAMBER! Only one wafer is in the system, and that is the one in the main etch chamber. From booth at snf.stanford.edu Mon May 26 09:14:58 2003 From: booth at snf.stanford.edu (booth at snf.stanford.edu) Date: May 26, 2003 9:14:58 AM Subject: Shutdown lampoly 2003-05-25 03:06:01: Report Clear for lampoly Message-ID: Removed Eric Ps wafer from etch chamber & put in plastic wafer holder on table. From booth at snf.stanford.edu Mon May 26 09:16:03 2003 From: booth at snf.stanford.edu (booth at snf.stanford.edu) Date: May 26, 2003 9:16:03 AM Subject: Shutdown lampoly 2003-05-26 09:16:02: Report Shutdown for lampoly Message-ID: System cannot communicate with hard disk. From booth at snf.stanford.edu Wed May 28 04:24:07 2003 From: booth at snf.stanford.edu (booth at snf.stanford.edu) Date: May 28, 2003 4:24:07 PM Subject: Shutdown lampoly 2003-05-26 09:16:02: Report Clear for lampoly Message-ID: scavenged old hard disk, copied recipes to hard disk ftom backup files. Doing leak rate test on etch chamber. Etch chamber needs to be seasoned before regular etch results can be expected.