From bchui at snf.stanford.edu Tue Nov 4 18:18:24 2003 From: bchui at snf.stanford.edu (bchui at snf.stanford.edu) Date: Tue, 4 Nov 2003 18:18:24 -0800 Subject: Problem lampoly 2003-11-04 18:18:24: Bad uniformity for recipe 25 Message-ID: For recipe 25 (150 HBr, 5 O2), top-left corner etches 10% faster than bottom-right corner (when etching Si). Etch rate roughly decreases linearly from top-left corner to bottom-right corner, in a diagonal direction across the wafer. (Wafer flat facing bottom). From cbaxter at snf.stanford.edu Tue Nov 4 20:10:49 2003 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Tue, 4 Nov 2003 20:10:49 -0800 Subject: Problem lampoly 2003-11-04 18:18:24: Bad uniformity for recipe 25 Message-ID: verfied leak rate and gas flow on hbr and o2, both are in spec. Also verified throttle valve control and its controlling fine. need data from previous user reported the problem. From ericp at snf.stanford.edu Thu Nov 6 01:57:20 2003 From: ericp at snf.stanford.edu (ericp at snf.stanford.edu) Date: Thu, 6 Nov 2003 01:57:20 -0800 Subject: Shutdown lampoly 2003-11-06 01:57:20: wafer on flat finder- ELL arm won't rotate Message-ID: While loading a wafer, an alarm came up saying that the arm wouldn't rotate. "Alarm 002 - Entrance load lock failed requested rotate action" ONE wafer is in the system, presently on the flat finder. There should be no other wafers in the system! From booth at snf.stanford.edu Thu Nov 6 06:38:33 2003 From: booth at snf.stanford.edu (booth at snf.stanford.edu) Date: Thu, 6 Nov 2003 06:38:33 -0800 Subject: Shutdown lampoly 2003-11-06 01:57:20: wafer on flat finder- ELL arm won't rotate Message-ID: recovered Erics wafer & put in holder. Reinitialized system, did wafer cleanout. System OK again.