From gyama at snf.stanford.edu Mon Aug 16 16:05:08 2004 From: gyama at snf.stanford.edu (gyama at snf.stanford.edu) Date: Mon, 16 Aug 2004 16:05:08 -0700 Subject: Shutdown lampoly SNF 2004-08-16 16:05:07: 1 wafers stuck in LL before etch chamber Message-ID: From cbaxter at snf.stanford.edu Mon Aug 16 17:09:36 2004 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Mon, 16 Aug 2004 17:09:36 -0700 Subject: Shutdown lampoly SNF 2004-08-16 16:05:07: 1 wafers stuck in LL before etch chamber Message-ID: cleared error and run wafer clean out. From gyama at snf.stanford.edu Thu Aug 19 14:07:18 2004 From: gyama at snf.stanford.edu (gyama at snf.stanford.edu) Date: Thu, 19 Aug 2004 14:07:18 -0700 Subject: Shutdown lampoly SNF 2004-08-19 14:07:18: 1 wafer in chamber for unload, stuck there Message-ID: 1 wafer in enter LL, 1 wafer waiting to go into enter LL From cbaxter at snf.stanford.edu Thu Aug 19 16:24:52 2004 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Thu, 19 Aug 2004 16:24:52 -0700 Subject: Shutdown lampoly SNF 2004-08-19 14:07:18: 1 wafer in chamber for unload, stuck there Message-ID: Elmer and I initalize exit load lock arm. resumed system and etch the last two wafers without a problem. From eenriquez at snf.stanford.edu Wed Aug 25 07:01:21 2004 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Wed, 25 Aug 2004 07:01:21 -0700 Subject: Problem lampoly SNF 2004-08-25 07:01:20: Chlorine and BCl3 bottle change Message-ID: Do not run proceses that require Cl2 or BCl3. From eenriquez at snf.stanford.edu Thu Aug 26 08:24:37 2004 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Thu, 26 Aug 2004 08:24:37 -0700 Subject: Problem lampoly SNF 2004-08-25 07:01:20: Chlorine and BCl3 bottle change Message-ID: Completed gas bottle change From eenriquez at snf.stanford.edu Thu Aug 26 10:20:08 2004 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Thu, 26 Aug 2004 10:20:08 -0700 Subject: Shutdown lampoly SNF 2004-08-26 10:20:08: No chlorine flow Message-ID: From eenriquez at snf.stanford.edu Thu Aug 26 11:06:58 2004 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Thu, 26 Aug 2004 11:06:58 -0700 Subject: Shutdown lampoly SNF 2004-08-26 10:20:08: No chlorine flow Message-ID: Un-stuck the nupro valve upstream of the Cl2 MFC. From gyama at snf.stanford.edu Thu Aug 26 13:00:49 2004 From: gyama at snf.stanford.edu (gyama at snf.stanford.edu) Date: Thu, 26 Aug 2004 13:00:49 -0700 Subject: Problem lampoly SNF 2004-08-26 13:00:49: Cl2 flow dropping to <25sccm during Message-ID: etch step 5. fault From cbaxter at snf.stanford.edu Thu Aug 26 18:02:00 2004 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Thu, 26 Aug 2004 18:02:00 -0700 Subject: Problem lampoly SNF 2004-08-26 13:00:49: Cl2 flow dropping to <25sccm during Message-ID: increase delivery pressure and flowed cl2 for 30mins no pressure drop encounter. From gyama at snf.stanford.edu Fri Aug 27 10:52:24 2004 From: gyama at snf.stanford.edu (gyama at snf.stanford.edu) Date: Fri, 27 Aug 2004 10:52:24 -0700 Subject: Problem lampoly SNF 2004-08-27 10:52:24: w/ both p5000 & pquest off Message-ID: recipe 1 step 5, Cl2 set for 40sccm, after 120s -38sccm, 150s - 37sccm, 170s - 36sccm, 186s - gas 1 low alarm, stop due to low flow From eenriquez at snf.stanford.edu Fri Aug 27 13:05:13 2004 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Fri, 27 Aug 2004 13:05:13 -0700 Subject: Problem lampoly SNF 2004-08-27 10:52:24: w/ both p5000 & pquest off Message-ID: Increased the pneumatic air pressure from 80 to 90 psi. Cycled the Cl2 nupro valve open and close about 50 times. Gary ran about 10 dummy wafers thru the system with no problems. From ginel at snf.stanford.edu Mon Aug 30 11:42:13 2004 From: ginel at snf.stanford.edu (ginel at snf.stanford.edu) Date: Mon, 30 Aug 2004 11:42:13 -0700 Subject: Shutdown lampoly SNF 2004-08-30 11:42:12: low pressure on clean2 Message-ID: clean2 failed due to low pressure 8.8mT instead of 15mT; chamber still needs cleaning after long etch From gyama at snf.stanford.edu Tue Aug 31 10:33:54 2004 From: gyama at snf.stanford.edu (gyama at snf.stanford.edu) Date: Tue, 31 Aug 2004 10:33:54 -0700 Subject: Problem lampoly SNF 2004-08-31 10:33:53: recipe1 calls for 15 pressure, geting 3.5 step5 Message-ID: throttle valve is 100% open From eenriquez at snf.stanford.edu Tue Aug 31 12:00:16 2004 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Tue, 31 Aug 2004 12:00:16 -0700 Subject: Problem lampoly SNF 2004-08-31 10:33:53: recipe1 calls for 15 pressure, geting 3.5 step5 Message-ID: Pressure controller not controlling. It was going to full open when the pressure setpoint was 15 mT. Changed the controller to local control and then back to remote. From eenriquez at snf.stanford.edu Tue Aug 31 12:00:40 2004 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Tue, 31 Aug 2004 12:00:40 -0700 Subject: Shutdown lampoly SNF 2004-08-30 11:42:12: low pressure on clean2 Message-ID: Pressure controller not controlling. It was going to full open when the pressure setpoint was 15 mT. Changed the controller to local control and then back to remote.